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Simulations of non-uniform embossing:the effect of asymmetric neighbor cavities on polymer flow during nanoimprint lithography.

机译：非均匀压花的模拟：非对称相邻腔对纳米压印光刻期间聚合物流动的影响。

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Schunk, Peter Randall; King, William P. (Georgia Institute of Technology, Atlanta, GA); Sun, Amy Cha-Tien; Rowland, Harry D. (Georgia Institute of Technology, Atlanta, GA);
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年度 2007
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1. Simulations of nonuniform embossing: The effect of asymmetric neighbor cavities on polymer flow during nanoimprint lithography [J] . Harry D. Rowland, William P. King, Amy C. Sun, Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures . 2005,第6期

机译：模拟非均匀压花：纳米压印光刻过程中不对称邻腔对聚合物流动的影响
2. Impact of polymer film thickness and cavity size on polymer flow during embossing: toward process design rules for nanoimprint lithography [J] . Rowland HD, Sun AC, Schunk PR, Journal of Micromechanics and Microengineering . 2005,第12期

机译：压花过程中聚合物膜厚度和空腔尺寸对聚合物流动的影响：朝着纳米压印光刻工艺设计规则的方向
3. Analysis of Polymer Flow in Embossing Stage During Thermal Nanoimprint Lithography [J] . S M Kim J H Kang W I Lee Polymer Engineering and Science . 2011,第2期

机译：纳米压印光刻中压花阶段聚合物流的分析
4. Experimental Analysis and Numerical Simulation of the Flow Behaviour of Thin Polymer Films during Hot Embossing [C] . M. Sahli, T. Barriere, J-C Gelin International Conference on Numerical Methods in Industrial Forming Processes . 2010

机译：薄膜薄膜薄膜流动性能的实验分析与数值模拟
5. Fabrication of a deoxyribonucleic acid polymer ridge waveguide electro-optic modulator by nanoimprint lithography. [D] . Fehrman Cory, Emily Marie. 2014

机译：通过纳米压印光刻技术制备脱氧核糖核酸聚合物脊形波导电光调制器。
6. High Aspect Ratio Nanoimprint Mold-Cavity Filling and Stress Simulation Based on Finite-Element Analysis [O] . Hongwen Sun, Minqi Yin, Haibin Wang 2017

机译：基于有限元分析的高长径比纳米压印模腔填充和应力模拟
7. Impact of polymer film thickness and cavity size on polymer flow during embossing : towards process design rules for nanoimprint lithography. [O] . Schunk, Peter Randall, King, William P. (Georgia Institute of Technology, Atlanta, GA), Sun, Amy Cha-Tien, 2006

机译：聚合物膜厚度和腔尺寸对压花过程中聚合物流动的影响：纳米压印光刻的工艺设计规则。

Simulations of non-uniform embossing:the effect of asymmetric neighbor cavities on polymer flow during nanoimprint lithography.

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